SHIMOGAKI Yukihiro
| Name | 霜垣 幸浩 / SHIMOGAKI Yukihiro |
|---|---|
| Degree | PhD |
| Occupation | Professor |
| Affiliation | Graduate School of Engineering |
| Affiliation site URL | http://www.t.u-tokyo.ac.jp/foee/index.html |
| Specialty | Device Processes (Thin Film Deposition,Dry Etching) |
| Research theme(s) | Thin Film Deposition by CVD,Thin Film Deposition by using Supercritical Fluid |
| Keywords related to research themes | ULSI Multilevel Metallization,Compound Semiconductor,Thermal CVD,Plasma CVD |
| Scopus Link to individual page | Scopus |
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