| Name |
三田 吉郎 / MITA Yoshio
|
| Degree |
PhD |
| Occupation |
Professor |
| Affiliation |
Graduate School of Engineering
|
| Affiliation site URL |
http://www.t.u-tokyo.ac.jp/foee/index.html |
| Specialty |
Micro Electro Mechanical Devices and Systems |
| Research theme(s) |
High-performance electronic devices and systems using MEMS technology |
| Keywords related to research themes |
CMOS post-process devices,MEMS opto-electrical devices,MEMS surface profiling systems,brand-new micro fabrication technologies |
| Scopus Link to individual page |
Scopus |
