3D monolithic SOI integrated sensors

1.1 Data Processing System (Novel Computing, Machine Learning, Neural Network, etc.)
1.4 Data Generation System (Sensor, Microsensor, etc.)
2.6 3D Design (3D Integration, 3D Implementation, 3D Module, etc.)

Kenji Shimazoe

Graduate School of Engineering

Project Associate Professor

We are developing 3D monolithic integrated sensors combining high-resistivity silicon and SOI based circuits. Optical photon sensors with single photon sensitivity and electron tracking sensors by Compton scattering are being developed for the application of medical field and industrial field.

Research collaborators

KEK
University of Miyazaki

Related publications

Koyama, A., et al. "A 250-μm pitch 36-channel silicon photo multiplier array prototype using silicon on insulator technology." Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment 924 (2019): 436-440.
Yoshihara, Y., et al. "Development of electron-tracking Compton imaging system with 30-μm SOI pixel sensor." Journal of Instrumentation 12.01 (2017): C01045.
Kamiya, Y., et al. "Development of a Neutron Imaging Sensor using INTPIX4-SOI Pixelated Silicon Devices." arXiv preprint arXiv:2006.05658 (2020).