Development of ultrahigh-resolution electromagnetic field imaging electron microscopy

3.7 Advanced Device/Material Evaluation Measurement Techniques (SEM, AFM, OCD, TEM, etc.)

Naoya Shibata

Graduate School of Engineering

Professor

We develop an electron microscopy method that can directly visualize the electromagnetic field distribution within semiconductor devices at ultrahigh resolution.

Schematic illustration of electromagnetic field imaging STEM
Naoya Shibata

Electric field image of a pn junction in GaAs semiconductor
Naoya Shibata

Research collaborators

JEOL Ltd.
Monash University, Australia

Related publications

N. Shibata et al., “Direct Visualization of Local Electromagnetic Field Structures by Scanning Transmission Electron Microscopy,”Acc. Chem. Res., 50, 1502-1512 (2017).
N. Shibata et al., “Imaging of built-in electric field at a p-n junction by scanning transmission electron microscopy,”Sci. Rep., 5, 10040 (2015).
N. Shibata et al., "Differential phase-contrast microscopy at atomic resolution,” Nature Phys., 8,611-615 (2012).