Advanced Nanocharacterization Platform in the University of Tokyo

3.7 Advanced Device/Material Evaluation Measurement Techniques (SEM, AFM, OCD, TEM, etc.)

Yuichi Ikuhara

Graduate School of Engineering

Professor

The state-of-the-art nanocharacterization equipments such as atomic resolution electron microscopes for semiconductor devices, nanotechnology, and materials science are shared nationwide, and many researches are widely supported.

Atomic resolution image and chemical map of an device interface
Advanced Nanocharacterization Platform

Electron microscopes for semiconductor characterization
Advanced Nanocharacterization Platform

Research collaborators

K.Takiguchi et al., “Giant gate-controlled proximity magnetoresistance in semiconductor-based ferromagnetic–non-magnetic bilayers,” Nat. Phys., 15, 1134-1139 (2019).
T. Makita et al., “High-performance, semiconducting membrane composed of ultrathin, single-crystal organic semiconductors,” PNAS, 117, 80-85 (2020).
A. Kumamoto et al., “Atomic structures of a liquid-phase bonded metal/nitride heterointerface,” Sci. Rep., 6, 22936 (2016).