Development of ultrahigh-resolution electromagnetic field imaging electron microscopy


- 3.7 Advanced Device/Material Evaluation Measurement Techniques (SEM, AFM, OCD, TEM, etc.)
Naoya Shibata
Graduate School of Engineering
Professor
We develop an electron microscopy method that can directly visualize the electromagnetic field distribution within semiconductor devices at ultrahigh resolution.
Related links
Research collaborators
JEOL Ltd.
Monash University, Australia
Monash University, Australia
Related publications
- N. Shibata et al., “Direct Visualization of Local Electromagnetic Field Structures by Scanning Transmission Electron Microscopy,”Acc. Chem. Res., 50, 1502-1512 (2017).
- N. Shibata et al., “Imaging of built-in electric field at a p-n junction by scanning transmission electron microscopy,”Sci. Rep., 5, 10040 (2015).
- N. Shibata et al., "Differential phase-contrast microscopy at atomic resolution,” Nature Phys., 8,611-615 (2012).
Related patents
Transmission electron microscope US 8,431,897 B2(2013.4.30)
SDGs
Contact
- Naoya Shibata School of Engineering,
- Tel: +81-3-5841-0415
- Email: shibata[at]sigma.t.u-tokyo.ac.jp
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